Kyoto Camera Upgrade: Innovations in Cavity Inspection and Image Automation
Discover the latest advancements in cavity inspection technology and image automation with the Kyoto Camera Upgrade. This upgrade includes a camera-cylinder rotation mechanism for enhanced inspection, an upgraded CCD camera with improved resolution and magnification, and illumination upgrades for brighter imaging. The system also features image capture automation for efficient file saving and defect pattern matching. Explore the cutting-edge developments in cavity fabrication and defect detection with the Kyoto Camera Upgrade.
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Presentation Transcript
Kyoto camera upgrade H. Hayano, 02242009 (Y. Iwashita, K. Watanabe, Y. Kikuchi)
Introduction of camera-cylinder rotation mechanism for cavity inspection with EP-VT support jigs, and for jacketed cavity. motor rotary encoder bearing rotation limiter
Upgrade under fabrication (1)CCD camera upgrade from 5 m CCD pixel to 2.2 m CCD pixel camera. (2) Lens upgrade more magnification with more larger aperture. (3) illumination upgrade EL panel has limited life with more high voltage (for more brightness). -> LED + light guide with scattered surface (twice more light). ~7 m/pixel targeting 3.5 m/pixel
Image capture automation (1)control of cavity position being done by VB application. (2) Image capture and automated file-save already done by VB application. (speed is enough fast, but must wait for vibration damping) (automated focus is the next concern) (3) defect pattern matching the software already fabricated in 2007 was tested using recent high quality pictures. -> no good results, so far. (match to every bright traces, not suspected defects only)
Use for cavity fabrication (1)EBW evaluation at dumbbell stage (for MHI-07, 08, 09) small pits were found at around equator region before EBW. (maybe they appeared after pressing) scratches were found on EBW seam in dumbbell caused by EBW clamp jig screws dismounting. (We fed back to fabrication line people.) (2) ..
