Optimizing UPW Analysis with Agilent 8900 and M Lens Technology
Explore the detailed analysis of UPW using Agilent 8900 equipped with M Lens by Kazuhiro Sakai and Yoshinori Shimamura from Agilent Technologies Japan. Learn about tuning parameters, ASTM and SEMI standards compliance, sensitivity, and calibration curves for precise data collection. Discover a simple method for achieving the best data with this advanced analytical setup.
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UPW analysis using Agilent 8900 with m lens Kazuhiro Sakai Yoshinori Shimamura Agilent Technologies Japan, Ltd. DE44369.9217592593 June 8, 2025 1
Background: Agilent 8900 with s lens 8 Tunes = 3 Cool Plasma Tunes + 5 Hot Plasma Tunes = Best Data = Can we provide a simple method? -> Yes Published Dec. 2016
ASTM and SEMI Standards =UPW= ASTM D5127-13 (2018) BEC : < 1 ppt (B: 50 ppt / Ti, V, Mn, Cd, Sn :10 ppt) SEMI F63-0521 (2021) BEC : < 1 ppt (B 50 ppt, Ni 3 ppt) D.L. : < 0.5 ppt (B 15 ppt, Ni 1.6 ppt) ASTM D5127-13 (2018) SEMI F63-0521 (2021) BEC : < 1 ppt (B 50 ppt) D.L. : < 0.5 ppt (B 15 ppt) BEC < 0.5 ppt (most of the elements) D.L. < 0.3 ppt Hot Plasma Condition
Tuning parameters : 8900 (m lens) No Gas RF Power Smpl Depth Nebulizer Gas Makeup Gas Extract 1 3.5 Extract 2 -20 Omega Bias -30 Omega Lens 3.0 Q1 Entrance -30 Q1 Exit -5 Cell Focus -5 Cell Entrance -70 Cell Exit -100 Deflect 13 Plate Bias Q1 Bias -5 Q1 Prefilter Bias -6 Q1 Postfilter Bias -7 He Flow 0 H2 Flow 0 3rd Gas Flow 0 4th Gas Flow 0 OctP Bias -12 Axial Acceleration 0 OctP RF 130 Energy Discrimination 3 Wait Time Offset 0 3 Tunes only Hot Plasma condition NH3+H2 1600 8.0 0.70 0.48 4.0 -40 O2 Parameter Sample Uptake Rate Description 200 L/min Nebulizer MFN-100 (standard) 3.0 -100 -40 5.9 -50 5 4 -50 -64 5.2 Spray Chamber and Torch Standard (Quartz, 2.5mm id Torch) Pt tipped sampling cone, Pt-tipped, Ni-based skimmer cone for m-lens (G3666-67501). Cones -1 -50 -50 -5 -50 Integration time 1 sec / isotope CeO+/Ce+ around 2 % (hot plasma) Reaction Gases Ammonia, Oxygen, Hydrogen 0 -5.5 -9 0 0 0 30 -3 2 180 -7 2 The 8900 ICP-QQQ (#200) was fitted with the standard Pt tipped sampling cone, optional m-lens (part number G3666- 67500), and optional Pt-tipped, Ni-based skimmer cone for m- lens (part number G3666-67501). 1 2 20 0 -10 2 170 -10 2
BEC 1.5 1.1 ppt SEMI Value (F63-0521) is < 1.0 ppt (B:50 ppt) 1.0 BEC (ppt) 0.5 0.0 Li B Na Mg Al K Ca Ti V Cr Mn Fe Co Ni Cu Zn As Sr Mo Cd Sn Sb Ba W Pt Pb BEC < 0.5 ppt (most of the elements)
D.L. 1.5 1.2 ppt 1.0 D.L. (ppt) SEMI Value (F63-0521) is < 0.5 ppt (B:15ppt) 0.5 0.0 Li B Na Mg Al K Ca Ti V Cr Mn Fe Co Ni Cu Zn As Sr Mo Cd Sn Sb Ba W Pt Pb D.L. < 0.3 ppt (most of the elements)
Sensitivity and Calibration Curves 8900 11 CPS /ppt (no-gas) 105 CPS /ppt (NH3 + H2) 17 CPS /ppt (O2) 4 CPS /ppt (O2) B Ca Ti As
UPW (1/1000 HNO3) b (blank) 18 0.0 Tune Mode No Gas UnitsCal 3SD Theo DL ppt Scan Type Q1 Q2 Name R a DATA/Theo DL BEC CPS Single Quad 7 0.9994 ppt 0.0 0.00 #DIV/0! Li 0.00 0.00 No Gas 10.4 0.96 1.2 Single Quad 11 0.9996 11 12 ppt B 1.18 1.11 No Gas NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS O2mode MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS O2mode MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS NH3+H2 MS/MS O2mode MS/MS O2mode MS/MS NH3+H2 MS/MS Single Quad 23 24 Mg 27 39 40 64 51 52 55 Mn 56 59 60 63 64 91 88 98 Mo 114 118 121 138 216 195 208 0.9992 0.9999 1.0000 1.0000 1.0000 0.9998 0.9995 0.9997 0.9999 0.9997 1.0000 0.9997 0.9994 0.9999 0.9999 0.9998 0.9989 0.9996 0.9996 0.9997 1.0000 0.9998 0.9996 1.0000 52 49 74 87 12.1 0.8 4.7 11.3 39.7 ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt ppt 10.4 2.7 6.5 10.1 18.9 0.20 0.06 0.09 0.12 0.18 0.00 0.04 0.19 0.08 0.18 0.04 0.20 0.23 0.13 0.23 0.01 0.05 0.04 0.11 0.05 0.02 0.20 0.26 0.05 1.3 0.9 1.2 1.0 1.0 Na 0.26 0.05 0.11 0.12 0.17 0.00 0.04 0.24 0.08 0.23 0.05 0.14 0.22 0.15 0.23 0.01 0.04 0.04 0.12 0.05 0.03 0.20 0.20 0.05 0.23 0.02 0.06 0.13 0.38 0.00 0.01 0.38 0.09 0.36 0.01 0.07 0.24 0.06 0.02 0.00 0.01 0.00 0.03 0.01 0.00 0.30 0.40 0.00 24 27 39 40 48 51 52 55 56 59 60 63 64 75 88 98 114 118 121 138 184 195 208 Al K Ca Ti V Cr 105 17 54 99 130 103 70 17 43 31 0 #DIV/0! 0.4 37.7 11.2 37.4 1.0 1.3 10.5 1.9 0.1 0.2 0.2 0.1 0.8 0.1 0.2 21 22 0.1 1.9 18.4 10.0 18.3 3.0 3.4 9.7 4.1 0.9 1.3 1.3 0.9 2.7 0.9 1.3 13.6 14.1 0.9 1.1 1.3 1.1 1.3 1.2 0.7 1.0 1.2 1.0 0.9 0.9 1.0 1.2 1.0 1.4 1.0 0.8 1.0 Fe Co Ni Cu Zn As Sr 4 127 29 25 25 20 68 69 55 21 Cd Sn Sb Ba W Pt Pb
Summary Target Value Simple Method; Hot Plasma only (3 Tunes) Our Results achieved 3 tunes only for Hot Plasma by using m lens BEC : SEMI : <1.0 ppt (B: 50 ppt) Most of the elements < 0.5ppt D.L. : SEMI : < 0.5 ppt (B:15ppt) Most of the elements < 0.3ppt Tips Sample Uptake Rate: about 200 L/min (MFN-100 ; standard) 1600W and CeO+/Ce = around 2% (True Hot Plasma condition)
m lens related parts for 8900 G3280-67036 G3666-67501 G3666-67500 for 7900 Pt Sampling cone Pt (Ni base) Skimmer for m-lens Extraction-Omega lens assy with m-lens, brass skimmer base G8400-67047 G3666-60401 G3666-60502 G3666-60503 G3666-20404 G3666-20405 G3280-67038 G3280-67040 G8400-60634 Brass Skimmer base Extraction 1 lens (m-lens) Extraction 2 lens (m-lens) Omega lens (89s-lens) Omega bias lens (89s-lens) Screw and spacer kit, for s/m/c-lens Ni Sampling cone G3666-67511 G3280-67036 G3280-67142 G3666-67501 Ni Skimmer for m-lens Pt Sampling cone Pt/Ni-plated Sampling cone Pt (Ni base) Skimmer for m-lens
